DocumentCode
2475045
Title
Determination of charge trapping ability in doped α-alumina
Author
Liébault, J. ; Siesse-Moya, D. ; Moya, F. ; Zarbout, K. ; Damamme, G. ; Moya, G.
Author_Institution
Lab. Materiaux et Microelectronique de Provence, CNRS, Marseille, France
fYear
2002
fDate
2002
Firstpage
652
Lastpage
655
Abstract
The influence of Ag, Mg and Cr impurities on the charge trapping characteristics of α alumina single crystal is investigated. The penetration profiles, after diffusion annealing, are determined from S.I.M.S. analysis leading to the impurity concentration in doped samples. Charge trapping abilities are deduced, with new experimental conditions, from the Induction Charge Method (I.C.M) during successive injections of 5 pC performed with an electron beam in a Scanning Electron Microscope. This method consists in measuring the evolution of the absorbed current, induced by the trapped charges in the metallic sample holder, during injection. From the new experimental conditions (low injection doses and defocused beam) a classification in terms of charge trapping ability for the various impurities is obtained and the dependence of the nature of impurity on the charge trapping properties is discussed.
Keywords
annealing; corundum; diffusion; doping profiles; scanning electron microscopy; secondary ion mass spectra; space charge; α-alumina single crystal; Al2O3:Ag; Al2O3:Cr; Al2O3:Mg; SIMS analysis; absorbed current measurement; charge injection; charge trapping; diffusion annealing; doping profile; electron beam; impurity concentration; induction charge method; insulating material; scanning electron microscope; Atomic beams; Electron beams; Electron emission; Electron microscopy; Electron traps; Low earth orbit satellites; Mirrors; Performance evaluation; Scanning electron microscopy; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical Insulation and Dielectric Phenomena, 2002 Annual Report Conference on
Print_ISBN
0-7803-7502-5
Type
conf
DOI
10.1109/CEIDP.2002.1048880
Filename
1048880
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