DocumentCode :
2475045
Title :
Determination of charge trapping ability in doped α-alumina
Author :
Liébault, J. ; Siesse-Moya, D. ; Moya, F. ; Zarbout, K. ; Damamme, G. ; Moya, G.
Author_Institution :
Lab. Materiaux et Microelectronique de Provence, CNRS, Marseille, France
fYear :
2002
fDate :
2002
Firstpage :
652
Lastpage :
655
Abstract :
The influence of Ag, Mg and Cr impurities on the charge trapping characteristics of α alumina single crystal is investigated. The penetration profiles, after diffusion annealing, are determined from S.I.M.S. analysis leading to the impurity concentration in doped samples. Charge trapping abilities are deduced, with new experimental conditions, from the Induction Charge Method (I.C.M) during successive injections of 5 pC performed with an electron beam in a Scanning Electron Microscope. This method consists in measuring the evolution of the absorbed current, induced by the trapped charges in the metallic sample holder, during injection. From the new experimental conditions (low injection doses and defocused beam) a classification in terms of charge trapping ability for the various impurities is obtained and the dependence of the nature of impurity on the charge trapping properties is discussed.
Keywords :
annealing; corundum; diffusion; doping profiles; scanning electron microscopy; secondary ion mass spectra; space charge; α-alumina single crystal; Al2O3:Ag; Al2O3:Cr; Al2O3:Mg; SIMS analysis; absorbed current measurement; charge injection; charge trapping; diffusion annealing; doping profile; electron beam; impurity concentration; induction charge method; insulating material; scanning electron microscope; Atomic beams; Electron beams; Electron emission; Electron microscopy; Electron traps; Low earth orbit satellites; Mirrors; Performance evaluation; Scanning electron microscopy; Testing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electrical Insulation and Dielectric Phenomena, 2002 Annual Report Conference on
Print_ISBN :
0-7803-7502-5
Type :
conf
DOI :
10.1109/CEIDP.2002.1048880
Filename :
1048880
Link To Document :
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