Title :
W-band measurements of 100 /spl mu/m height micro-machined air-filled rectangular waveguides
Author :
Collins, C.E. ; Digby, J.W. ; Pollard, R.D. ; Miles, R.E. ; Parkhurst, G.M. ; Chamberlain, J.M. ; Steenson, D.P. ; Cronin, N.J. ; Karatzas, L.S. ; Bowen, J.W.
Author_Institution :
Dept. of Electron. & Electr. Eng., Leeds Univ., UK
Abstract :
The first S-parameter measurements of micro-machined 100 /spl mu/m high air-filled rectangular waveguides are reported, which have been performed at W-band using a specially designed test fixture connected to a standard vector network analyser. The results obtained show low loss and demonstrate propagation in TE/sub 10/ mode.
Keywords :
S-parameters; micromachining; millimetre wave measurement; rectangular waveguides; 100 micron; S-parameter; TE/sub 10/ mode propagation; W-band measurement; loss; micro-machined air-filled rectangular waveguide; test fixture; vector network analyser; Coplanar waveguides; Cutoff frequency; Fixtures; Integrated circuit technology; Performance evaluation; Rectangular waveguides; Resists; Scattering parameters; Semiconductor waveguides; Testing;
Conference_Titel :
Microwave Symposium Digest, 1997., IEEE MTT-S International
Conference_Location :
Denver, CO, USA
Print_ISBN :
0-7803-3814-6
DOI :
10.1109/MWSYM.1997.596600
