Title :
Integrated optical structures grown by shadow masked MOCVD
Author :
Peake, G.M. ; Sarangan, A.M. ; Hersee, S.D.
Author_Institution :
Center for High Technol. Mater., New Mexico Univ., Albuquerque, NM, USA
Abstract :
Free-space optical interconnects based on VCSEL arrays require passive optical elements to improve emitter-to-detector coupling, thereby reducing crosstalk between channels and allowing lower power operation. We will describe the fabrication and properties of high quality microlenses made using shadow-masked, metalorganic chemical vapor growth (SMMG). We will also describe how this technique could be extended to enhance spatial mode discrimination in large area VCSELs
Keywords :
CVD coatings; integrated optics; laser modes; masks; microlenses; optical fabrication; optical interconnections; semiconductor laser arrays; surface emitting lasers; SMMG growth; VCSEL array; emitter-to-detector coupling; fabrication; free-space optical interconnect; integrated optical structure; microlens; passive optical element; shadow masked metalorganic chemical vapor deposition; spatial mode; Chemical elements; Integrated optics; MOCVD; Optical arrays; Optical coupling; Optical crosstalk; Optical device fabrication; Optical interconnections; Stimulated emission; Vertical cavity surface emitting lasers;
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1998. LEOS '98. IEEE
Conference_Location :
Orlando, FL
Print_ISBN :
0-7803-4947-4
DOI :
10.1109/LEOS.1998.739788
