Integrated optical structures grown by shadow masked MOCVD

Author

Peake, G.M. ; Sarangan, A.M. ; Hersee, S.D.

Author_Institution

Center for High Technol. Mater., New Mexico Univ., Albuquerque, NM, USA

Volume

2

fYear

1998

fDate

3-4 Dec 1998

Firstpage

411

Abstract

Free-space optical interconnects based on VCSEL arrays require passive optical elements to improve emitter-to-detector coupling, thereby reducing crosstalk between channels and allowing lower power operation. We will describe the fabrication and properties of high quality microlenses made using shadow-masked, metalorganic chemical vapor growth (SMMG). We will also describe how this technique could be extended to enhance spatial mode discrimination in large area VCSELs

Keywords

CVD coatings; integrated optics; laser modes; masks; microlenses; optical fabrication; optical interconnections; semiconductor laser arrays; surface emitting lasers; SMMG growth; VCSEL array; emitter-to-detector coupling; fabrication; free-space optical interconnect; integrated optical structure; microlens; passive optical element; shadow masked metalorganic chemical vapor deposition; spatial mode; Chemical elements; Integrated optics; MOCVD; Optical arrays; Optical coupling; Optical crosstalk; Optical device fabrication; Optical interconnections; Stimulated emission; Vertical cavity surface emitting lasers;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Society Annual Meeting, 1998. LEOS '98. IEEE

Conference_Location

Orlando, FL

Print_ISBN

0-7803-4947-4

Type

conf

DOI

10.1109/LEOS.1998.739788

Filename

739788