DocumentCode
2475506
Title
Comb- Actuated resonant torsional scanner for microdisplays
Author
Arslan, Aslihan ; Holmstrom, Sven ; Gokce, S. Kutal ; Urey, Hakan
Author_Institution
Opt. Microsyst. Lab., Koc Univ., Istanbul, Turkey
fYear
2009
fDate
17-20 Aug. 2009
Firstpage
139
Lastpage
140
Abstract
A comb-actuated 1D torsional MEMS scanner is developed for high resolution projection display systems using mechanical coupling principle. 64deg TOSA (total optical scan angle) is achieved at 22.1 kHz with 170 V peak-to-peak excitation voltages.
Keywords
actuators; micro-optomechanical devices; optical scanners; 1D torsional MEMS scanner; comb actuator; frequency 22.1 kHz; high resolution projection display systems; mechanical coupling; peak-to-peak excitation voltages; resonant torsional scanner; total optical scan angle; Damping; Displays; Fingers; Microdisplays; Micromechanical devices; Mirrors; Resonance; Resonant frequency; Torque; Voltage; Torsional scanner; comb drive; display; mechanical coupling;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on
Conference_Location
Clearwater, FL
Print_ISBN
978-1-4244-2382-8
Electronic_ISBN
978-1-4244-2382-8
Type
conf
DOI
10.1109/OMEMS.2009.5338540
Filename
5338540
Link To Document