DocumentCode
2475525
Title
Variable-focus SU-8 membrane mirror with enhanced stroke using feedback control
Author
Lukes, Sarah ; Lutzenberger, B. Jeffrey ; Dunbar, Erwin ; Shaw, Steven R. ; Dickensheets, David L.
Author_Institution
Electr. & Comput. Eng. Dept., Montana State Univ., Bozeman, MT, USA
fYear
2009
fDate
17-20 Aug. 2009
Firstpage
141
Lastpage
142
Abstract
We describe enhanced deflection of an electrostatic deformable mirror made from SU-8 epoxy. Using closed-loop feedback control, stable static deflection of a circular mirror to 75% of the air-gap has been achieved.
Keywords
adaptive optics; closed loop systems; electrostatics; feedback; membranes; mirrors; optical control; optical focusing; optical polymers; air-gap; circular mirror; closed-loop feedback control; electrostatic deformable mirror; enhanced stroke; stable static deflection; variable-focus SU-8 epoxy membrane mirror; Aluminum; Biomembranes; Electrodes; Feedback control; Mirrors; Optical buffering; Optical feedback; Optical sensors; Silicon; Wafer bonding;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on
Conference_Location
Clearwater, FL
Print_ISBN
978-1-4244-2382-8
Electronic_ISBN
978-1-4244-2382-8
Type
conf
DOI
10.1109/OMEMS.2009.5338541
Filename
5338541
Link To Document