Title :
A MEMS scanner with four orthogonally arranged rotators actuated by electromagnetic force
Author :
Lee, Sung-Kil ; Kim, Man Geun ; Jun, Min-Ho ; Moon, Seung-Hwan ; Lee, Jong-Hyun
Author_Institution :
Sch. of Inf. & Mechatron., Gwangju Inst. of Sci. & Technol. (GIST), Gwangju, South Korea
Abstract :
A torsional optical microscanner was demonstrated with four orthogonally arranged rotators, which offer a unique advantage to amplify a scanning angle through torque arms. The four rotators to oscillate the micromirror were operated by an interaction between input current through the microcoil and external magnetic field. For the fabricated optical scanner with the mirror area of 1.2 times 1.2 mm2, the optical scanning angle was experimentally measured as large as 16deg at 54 mA and the resonant frequency was 8.55 kHz for the x-axis rotation, respectively.
Keywords :
micro-optomechanical devices; micromirrors; optical scanners; MEMS scanner; current 54 mA; electromagnetic force; external magnetic field; frequency 8.55 kHz; microcoil; micromirror; optical scanning angle; orthogonally arranged rotators; resonant frequency; torsional optical microscanner; Area measurement; Arm; Electromagnetic forces; Frequency measurement; Magnetic field measurement; Micromechanical devices; Micromirrors; Mirrors; Stimulated emission; Torque; Electromagnetic Actuator; Microcoil; Micromirror; Optical scanner; Rotator;
Conference_Titel :
Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on
Conference_Location :
Clearwater, FL
Print_ISBN :
978-1-4244-2382-8
Electronic_ISBN :
978-1-4244-2382-8
DOI :
10.1109/OMEMS.2009.5338543
