A MEMS scanner with four orthogonally arranged rotators actuated by electromagnetic force

A torsional optical microscanner was demonstrated with four orthogonally arranged rotators, which offer a unique advantage to amplify a scanning angle through torque arms. The four rotators to oscillate the micromirror were operated by an interaction between input current through the microcoil and external magnetic field. For the fabricated optical scanner with the mirror area of 1.2 times 1.2 mm², the optical scanning angle was experimentally measured as large as 16deg at 54 mA and the resonant frequency was 8.55 kHz for the x-axis rotation, respectively.