Title :
Large-aperture, rapid scanning MEMS micromirrors for free-space optical communications
Author :
Wu, Lei ; Xie, Huikai
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Florida, Gainesville, FL, USA
Abstract :
Electrothermally-actuated MEMS mirrors with large apertures of 6 mm and 10 mm are reported. Optical scan above 10deg, divergence below 0.53 mrad and resonance frequencies in the order of 100 Hz have been achieved.
Keywords :
electric actuators; micro-optomechanical devices; micromirrors; MEMS; aperture size; divergence angles; electrothermal actuator; free-space optical communications; rapid scanning micromirrors; resonance frequencies; size 10 mm; size 6 mm; Actuators; Apertures; Electrothermal effects; Laser beams; Micromechanical devices; Micromirrors; Mirrors; Optical device fabrication; Optical fiber communication; Optical transmitters; MEMS; electrothermal actuation; free-space optical communications; large aperture; micromirror;
Conference_Titel :
Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on
Conference_Location :
Clearwater, FL
Print_ISBN :
978-1-4244-2382-8
Electronic_ISBN :
978-1-4244-2382-8
DOI :
10.1109/OMEMS.2009.5338553
