Air friction loss of comb drive resonant micro mirrors for laser scanning display

Author

Chu Manh Hoang ; Hane, Kazuhiro

Author_Institution

Dept. of Nanomech., Tohoku Univ., Sendai, Japan

fYear

2009

fDate

17-20 Aug. 2009

Firstpage

125

Lastpage

126

Abstract

The electrostatically driven scanning micro mirrors are fabricated for the application to laser scanning display. However, a high voltage is needed for the operation. In order to operate mirror at a low voltage, we investigate the air friction loss of micro mirror with vertically driven comb in vacuum. Due to the operation in vacuum, the rotation angle increases by 52 times larger than that in atmospheric air at the same operation voltage, which corresponds to the decrease of operation voltage by a factor more than 7 at 24.5 kHz resonant frequency. The quality factor depending on air damping is investigated in pressure range from 10⁵ Pa to 10^-1 Pa. The theoretical analyses on air friction loss are also presented.

Keywords

Q-factor; damping; friction; micro-optomechanical devices; air damping; air friction loss; atmospheric air; comb drive; electrostatics; frequency 24.5 kHz; laser scanning display; operation voltage; quality factor; resonant micromirrors; scanning micromirrors; Damping; Displays; Drives; Friction; Laser applications; Low voltage; Mirrors; Q factor; Resonance; Resonant frequency;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on

Conference_Location

Clearwater, FL

Print_ISBN

978-1-4244-2382-8

Electronic_ISBN

978-1-4244-2382-8

Type

conf

DOI

10.1109/OMEMS.2009.5338561

Filename

5338561