Optical characterization technique for MEMS comb-drive resonators

Author

Sabry, Y. ; Medhat, M. ; Saadany, B. ; Safwat, A. ; Khalil, D.

Author_Institution

Fac. of Eng., Ain-Shams Univ., Cairo, Egypt

fYear

2009

fDate

17-20 Aug. 2009

Firstpage

127

Lastpage

128

Abstract

A novel optical technique is proposed for the characterization of MEMS resonators. The proposed technique is based on measuring the response of the resonator (resonance frequency and quality factor) optically, which eliminates the electrical parasitic effects. The proposed technique was applied to a comb-drive resonator and the obtained results show good agreement with the standard electrical technique with 2-5% deviation in the resonance frequency and 2-10% in the quality factor.

Keywords

Q-factor; mechanical variables measurement; micro-optomechanical devices; micromechanical resonators; micromirrors; MEMS resonators; comb-drive resonator; electrical parasitic effects; mirror; optical characterization technique; quality factor; resonance frequency; Actuators; Electric variables measurement; Frequency measurement; Micromechanical devices; Optical interferometry; Optical resonators; Optical sensors; Q factor; Resonance; Resonant frequency; Comb-Drive Resonator; Fabry-Pérot Interferometer; MEMS Resonator; Optical Characterization; Quality Factor; Resonance Frequency;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on

Conference_Location

Clearwater, FL

Print_ISBN

978-1-4244-2382-8

Electronic_ISBN

978-1-4244-2382-8

Type

conf

DOI

10.1109/OMEMS.2009.5338564

Filename

5338564