Title :
Development of a micro displacement sensor with monolithic-integrated two-dimensionally distributed photodiodes
Author :
Inokuchi, M. ; Ando, H. ; Kinosita, M. ; Akase, K. ; Higurashi, Eiji ; Sawada, R.
Author_Institution :
Dept. of Intell. Machinery & Syst., Kyushu Univ., Fukuoka, Japan
Abstract :
We have developed an ultra-micro displacement sensor (Size:1.3 mmtimes1.3 mmtimes1.3 mm) consisting of two-dimensionally distributed monolithically integrated photodiodes (PD) and a vertical cavity surface emitting laser (VCSEL). The sensor size is not only very small, about one hundredth the size of conventional types of this sensor, but it also has a wider measurement range and discrimination of the external mirror shape can be enabled.
Keywords :
displacement measurement; integrated optics; measurement by laser beam; micro-optomechanical devices; microsensors; photodiodes; surface emitting lasers; VCSEL; external mirror shape; monolithic-integrated two-dimensionally distributed photodiodes; sensor size; size 1.3 mm; ultramicrodisplacement sensor; vertical cavity surface emitting laser; Displacement measurement; Equations; Intelligent sensors; Mirrors; Motion measurement; Photodiodes; Position measurement; Semiconductor device measurement; Shape measurement; Vertical cavity surface emitting lasers;
Conference_Titel :
Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on
Conference_Location :
Clearwater, FL
Print_ISBN :
978-1-4244-2382-8
Electronic_ISBN :
978-1-4244-2382-8
DOI :
10.1109/OMEMS.2009.5338576
