Automated quality control for microtechnology components using a depth from focus approach

Author

Schaper, Daniel

Author_Institution

Inst. fur Theor. Nachrichtentech. und Inf., Hannover Univ., Germany

fYear

2002

fDate

2002

Firstpage

50

Lastpage

54

Abstract

This paper describes an optical approach to verifying the geometric accuracy of object surfaces structured by an excimer laser. Due to the restricted space in the excimer laser system, a passive optical approach is chosen to be integrated in the system. Different optical techniques are compared. Their advantages and disadvantages for the use of integrating them in a laser system are discussed. The depth from focus approach is presented to create 3D models of surfaces structured by a laser and experimental results are shown. A proposal is given for implementing a runtime control loop for the laser system

Keywords

image processing; laser beam machining; laser materials processing; micromachining; optical focusing; quality control; solid modelling; spatial variables measurement; 3D models; automated quality control; depth-from-focus approach; excimer laser; image stack; microtechnology components; object surface geometry; passive optical approach; Adaptive optics; Cameras; Geometrical optics; Laser modes; Monitoring; Optical interferometry; Optical microscopy; Optical pulses; Quality control; Surface emitting lasers;

fLanguage

English

Publisher

ieee

Conference_Titel

Image Analysis and Interpretation, 2002. Proceedings. Fifth IEEE Southwest Symposium on

Conference_Location

Sante Fe, NM

Print_ISBN

0-7695-1537-1

Type

conf

DOI

10.1109/IAI.2002.999888

Filename

999888