• DocumentCode
    2475903
  • Title

    Micromachined reflective X-ray concentrator for microanalysis

  • Author

    Ezoe, Yuichiro ; Mitsuishi, Ikuyuki ; Takagi, Utako ; Mitsuda, Kazuhisa

  • Author_Institution
    Tokyo Metropolitan Univ., Tokyo, Japan
  • fYear
    2009
  • fDate
    17-20 Aug. 2009
  • Firstpage
    113
  • Lastpage
    114
  • Abstract
    We propose novel micromachined reflective X-ray concentrators for microanalysis, which have a large design flexibility and can be low cost. Ray-tracing simulations are conducted to estimate the performance.
  • Keywords
    X-ray applications; micromechanical devices; ray tracing; micromachined concentrator; ray-tracing simulations; reflective X-ray concentrator; Costs; Electron emission; Fluorescence; Mirrors; Optical reflection; Optical scattering; Ray tracing; Scanning electron microscopy; Spectroscopy; Stimulated emission;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on
  • Conference_Location
    Clearwater, FL
  • Print_ISBN
    978-1-4244-2382-8
  • Electronic_ISBN
    978-1-4244-2382-8
  • Type

    conf

  • DOI
    10.1109/OMEMS.2009.5338577
  • Filename
    5338577