Title :
CMOS-MEMS based optical phase shifter array with high fill factor
Author :
Chiou, J.C. ; Hung, C.C. ; Shieh, L.J. ; Tsai, Z.L.
Author_Institution :
Dept. of Electr. & Control Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan
Abstract :
The proposed CMOS-MEMS optical phase shifter activates lambda/4 vertical displacement with 3 V driving voltages and achieves the mirror deformation within lambda/10. The fill factor is 90% without the need of flip-chip bonding technology.
Keywords :
electrostatic devices; micro-optomechanical devices; micromirrors; optical arrays; optical phase shifters; CMOS; MEMS; electrostatic phase shifter; fill factor; micromirror array; mirror deformation; optical phase shifter array; vertical displacement; voltage 3 V; Bonding; Electrodes; Etching; Micromechanical devices; Mirrors; Optical arrays; Phase shifters; Phased arrays; Silicon; Voltage;
Conference_Titel :
Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on
Conference_Location :
Clearwater, FL
Print_ISBN :
978-1-4244-2382-8
Electronic_ISBN :
978-1-4244-2382-8
DOI :
10.1109/OMEMS.2009.5338578
