Challenges and limitations of nanomeasuring technology

Author

Jaeger, Gerd

Author_Institution

Inst. of Process Meas. & Sensor Technol., Ilmenau Univ. of Technol., Ilmenau, Germany

fYear

2012

fDate

13-16 May 2012

Firstpage

1814

Lastpage

1818

Abstract

The paper describes traceable nanometrology based on nanomeasuring machines. The high performance of the machines is explained with a metrological analysis. This analysis shows some of today´s limits of nanomeasuring technology. The limits are based, for instance, on the metre definition, the influence of the refractive index of the air, the violation of the Abbe comparator principle and on the instability of the machines metrological frame. There are various coordinate measuring machines which are based on different working modes: scanning probe mode, mixed scanning mode and sample scanning mode. These modes are analyzed with respect to uncertainties of measurement. The wide applications of nanomeasuring machines is realized by means of integration of optical and tactile nanoprobes.

Keywords

coordinate measuring machines; abbe comparator principle; coordinate measuring machines; machine metrological frame; mixed scanning mode; nanomeasuring machines; nanomeasuring technology; nanometrology; optical integration; sample scanning mode; scanning probe mode; tactile nanoprobes; Interferometers; Measurement by laser beam; Measurement uncertainty; Mirrors; Optical interferometry; Probes; Uncertainty; metrological analysis; nanomeasuring machine; nanoprobes;

fLanguage

English

Publisher

ieee

Conference_Titel

Instrumentation and Measurement Technology Conference (I2MTC), 2012 IEEE International

Conference_Location

Graz

ISSN

1091-5281

Print_ISBN

978-1-4577-1773-4

Type

conf

DOI

10.1109/I2MTC.2012.6229155

Filename

6229155