Challenges and limitations of nanomeasuring technology

The paper describes traceable nanometrology based on nanomeasuring machines. The high performance of the machines is explained with a metrological analysis. This analysis shows some of today´s limits of nanomeasuring technology. The limits are based, for instance, on the metre definition, the influence of the refractive index of the air, the violation of the Abbe comparator principle and on the instability of the machines metrological frame. There are various coordinate measuring machines which are based on different working modes: scanning probe mode, mixed scanning mode and sample scanning mode. These modes are analyzed with respect to uncertainties of measurement. The wide applications of nanomeasuring machines is realized by means of integration of optical and tactile nanoprobes.