An air-bearing displacement sensor for nanometrology of surface forms

This paper presents the experimental investigations for performance evaluation of an air-bearing displacement sensor as a measurement system for nanometrology of surface forms by using it. The experimental configuration and some considerations for the air-bearing displacement sensor are described. Then, in order to identify the basic performance of the sensor, a measuring force and displacement output of the sensor are evaluated on a vibration isolated table. The sensor is also mounted on a diamond turning machine to evaluate the surface form of micro structures. A roll workpiece with Ni-P plating surface, on which micro-lens array are fabricated by using a FS-FTS (Force sensor fast tool servo) on the machine tool, is employed as a specimen for measurement.