DocumentCode
2476254
Title
Light scattering by silicon wafer defects analysis based on discrete sources method
Author
Eremin, Yu.A. ; Orloy, N.V.
Author_Institution
Moscow Lomonosov State University
fYear
1996
fDate
1996
Keywords
Computer aided manufacturing; Inspection; Light scattering; Mathematics; Particle scattering; Semiconductor device manufacture; Silicon; Substrates; Surface contamination; Surface morphology;
fLanguage
English
Publisher
ieee
Conference_Titel
Applied Electromagnetism, 1996. Trans Black Sea Region Symposium on
Conference_Location
Hellas, Greece
Print_ISBN
0-7803-3763-8
Type
conf
DOI
10.1109/AEM.1996.872897
Filename
872897
Link To Document