Title :
A tunable microlens with 0.9 mm scan range and small lateral shift
Author :
Wu, Lei ; Xie, Huikai
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Florida, Gainesville, FL, USA
Abstract :
We report an electrothermally-actuated microlens scanner suitable for biomedical imaging applications. Large vertical actuation range of ~0.9 mm with small lateral shift (< 7 mum) and tilting (< 0.38deg) is demonstrated for assembled glass lenses.
Keywords :
electric actuators; microlenses; optical design techniques; optical fabrication; optical scanners; optical tuning; assembled glass lenses; biomedical imaging; electrothermally-actuated microlens scanner; lateral shift; tunable microlens; vertical actuation; Actuators; Assembly; Biomedical imaging; Biomedical optical imaging; Electrothermal effects; Glass; Lenses; Microoptics; Scanning electron microscopy; Voltage; biomedical imaging; electrothermal bimorph; large vertical displacement; lateral shift free; tunable microlens;
Conference_Titel :
Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on
Conference_Location :
Clearwater, FL
Print_ISBN :
978-1-4244-2382-8
Electronic_ISBN :
978-1-4244-2382-8
DOI :
10.1109/OMEMS.2009.5338591
