DocumentCode
2476306
Title
High-fill-factor, tip-tilt-piston micromirror array with hidden bimorph actuators and surface mounting capability
Author
Jia, K. ; Pal, S. ; Xie, H.
Author_Institution
Dept. of Electr. & Comput. Eng., Univ. of Florida, Gainesville, FL, USA
fYear
2009
fDate
17-20 Aug. 2009
Firstpage
67
Lastpage
68
Abstract
This paper presents the design, fabrication method and experimental results of electrothermal bimorph-actuated micromirror arrays with tip-tilt-piston capability, hidden actuators, and 88% area fill factor.
Keywords
actuators; micromirrors; optical arrays; optical design techniques; optical fabrication; surface mount technology; bimorph actuators; fill-factor; hidden actuators; surface mounting; tip-tilt-piston micromirror array; Actuators; Bonding; Electrothermal effects; Fabrication; Micromechanical devices; Micromirrors; Mirrors; Optical films; Silicon; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on
Conference_Location
Clearwater, FL
Print_ISBN
978-1-4244-2382-8
Electronic_ISBN
978-1-4244-2382-8
Type
conf
DOI
10.1109/OMEMS.2009.5338594
Filename
5338594
Link To Document