Optical MEMS filter for gas spectroscopy

Author

Bakke, Thor ; Sagberg, Håkon ; Grepstad, Jon Olav ; Lacolle, Matthieu ; Herbjørnrød, Aina K. ; Jensen, Geir Uri ; Johansen, Ib-Rune

Author_Institution

SINTEF ICT, Oslo, Norway

fYear

2009

fDate

17-20 Aug. 2009

Firstpage

61

Lastpage

62

Abstract

An optical MEMS filter for infrared spectroscopy has been designed, fabricated, and tested. The filter is a deformable hologram which combines focusing and optical filtering into one element. By modulating sections of the hologram, transmission spectra adapted to the absorption lines of a gas can be generated, allowing accurate measurements of gas concentration. The device is fabricated by micromachining grooves in silicon on top of an electrostatic actuator.

Keywords

holographic optical elements; holography; infrared spectroscopy; micro-optomechanical devices; micromachining; optical design techniques; optical fabrication; optical filters; optical testing; silicon; Si; deformable hologram; gas spectroscopy; infrared spectroscopy; micromachining; optical MEMS filter; Electromagnetic wave absorption; Electrostatic measurements; Filtering; Infrared spectra; Micromechanical devices; Optical design; Optical filters; Optical modulation; Spectroscopy; Testing; Hologram; diffractive optics; gas spectroscopy; optical filter;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on

Conference_Location

Clearwater, FL

Print_ISBN

978-1-4244-2382-8

Electronic_ISBN

978-1-4244-2382-8

Type

conf

DOI

10.1109/OMEMS.2009.5338595

Filename

5338595