DocumentCode
2476370
Title
Properties of Thin Film and Silicon Solid State Components - Their Effects on Microcircuit Performance
Author
Ekiss, J.A. ; Roschen, J. ; Thomas, P.G.
fYear
1962
fDate
1962
Firstpage
291
Lastpage
308
Keywords
Capacitors; Equivalent circuits; Fabrication; Resistors; Semiconductor thin films; Silicon; Solid state circuits; Sputtering; Substrates; Thin film circuits;
fLanguage
English
Publisher
ieee
Conference_Titel
1962 IRE National Convention
Type
conf
DOI
10.1109/IRENC.1962.199251
Filename
1536191
Link To Document