Title :
An electrothermally actuated bi-axis scanning micromirror for medical imaging applications
Author :
Izhar, U. ; Ooi, B.S. ; Tatic-Lucic, S.
Author_Institution :
Electr. & Comput. Eng. Dept., Lehigh Univ., Bethlehem, PA, USA
Abstract :
We present the design, fabrication and initial characterization results of a novel electrothermal micromirror. Deflection angle of up to 20deg at input power of 14 mW with temperature of less than 100degC was observed.
Keywords :
biomedical imaging; microfabrication; micromirrors; deflection angle; electrothermally actuated bi-axis scanning micromirror; medical imaging applications; micromirror design; micromirror fabrication; power 14 mW; Actuators; Aluminum; Biomedical imaging; Biomedical optical imaging; Connectors; Electrothermal effects; Micromirrors; Mirrors; Optical device fabrication; Temperature;
Conference_Titel :
Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on
Conference_Location :
Clearwater, FL
Print_ISBN :
978-1-4244-2382-8
Electronic_ISBN :
978-1-4244-2382-8
DOI :
10.1109/OMEMS.2009.5338599
