DocumentCode
2476431
Title
Maximization of constant velocity scan range of electrothermally-actuated micromirror by pulse width modulated drive
Author
Pal, Sagnik ; Xie, Huikai
Author_Institution
Dept. of Electr. & Comput. Eng., Univ. of Florida, Gainesville, FL, USA
fYear
2009
fDate
17-20 Aug. 2009
Firstpage
55
Lastpage
56
Abstract
Actuation of thermal bimorph-based electrothermal micromirrors by pulse width modulated (PWM) voltage is reported. PWM actuation provides more flexibility over continuous voltage waveforms especially in the case of micromirror arrays.
Keywords
micro-optomechanical devices; microactuators; micromirrors; pulse width modulation; PWM; actuation; constant velocity scan range; electrothermal micromirrors; pulse width modulateion; Actuators; Biomedical optical imaging; Electrothermal effects; Micromirrors; Mirrors; Optical interferometry; Pulse width modulation; Resistance heating; Space vector pulse width modulation; Voltage; Electrothermal actuation; MEMS; PWM; bimorph; micromirror; pulse width modulation;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on
Conference_Location
Clearwater, FL
Print_ISBN
978-1-4244-2382-8
Electronic_ISBN
978-1-4244-2382-8
Type
conf
DOI
10.1109/OMEMS.2009.5338600
Filename
5338600
Link To Document