Title :
Spherical silicon micro-mirrors bent by anodic bonding
Author :
Yamasaki, Takahiro ; Hokari, Ryohei ; Hane, Kazuhiro
Author_Institution :
Dept. of Nanomech., Tohoku Univ., Sendai, Japan
Abstract :
We propose a method to generate spherical micro-mirror by anodic bonding. A flat silicon plate is bent with fulcrum to form a spherical shape by anodic bonding. Convex spherical surface is generated inside the fulcrum by the bending moment generated in circumference of micro-mirror. Due to the bent surface of silicon plate, a smooth spherical surface is obtained. The focal length is in the range form 0.4 mm to 1.6 mm for the fulcrum diameters from 100 mum to 400 mum. The fabricated micro-mirror is also used as mold for the replication of micro polymer lens. The surface profile of micro-mirror is transferred to the polymer replica with a high accuracy.
Keywords :
micro-optomechanical devices; microlenses; micromirrors; moulding; optical polymers; replica techniques; silicon; Si; anodic bonding; convex spherical surface; micropolymer lens; replication; spherical silicon micromirrors; Bonding; Etching; Glass; Lenses; Mirrors; Polymers; Resists; Rough surfaces; Shape; Silicon;
Conference_Titel :
Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on
Conference_Location :
Clearwater, FL
Print_ISBN :
978-1-4244-2382-8
Electronic_ISBN :
978-1-4244-2382-8
DOI :
10.1109/OMEMS.2009.5338602
