Spherical silicon micro-mirrors bent by anodic bonding

Author

Yamasaki, Takahiro ; Hokari, Ryohei ; Hane, Kazuhiro

Author_Institution

Dept. of Nanomech., Tohoku Univ., Sendai, Japan

fYear

2009

fDate

17-20 Aug. 2009

Firstpage

51

Lastpage

52

Abstract

We propose a method to generate spherical micro-mirror by anodic bonding. A flat silicon plate is bent with fulcrum to form a spherical shape by anodic bonding. Convex spherical surface is generated inside the fulcrum by the bending moment generated in circumference of micro-mirror. Due to the bent surface of silicon plate, a smooth spherical surface is obtained. The focal length is in the range form 0.4 mm to 1.6 mm for the fulcrum diameters from 100 mum to 400 mum. The fabricated micro-mirror is also used as mold for the replication of micro polymer lens. The surface profile of micro-mirror is transferred to the polymer replica with a high accuracy.

Keywords

micro-optomechanical devices; microlenses; micromirrors; moulding; optical polymers; replica techniques; silicon; Si; anodic bonding; convex spherical surface; micropolymer lens; replication; spherical silicon micromirrors; Bonding; Etching; Glass; Lenses; Mirrors; Polymers; Resists; Rough surfaces; Shape; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on

Conference_Location

Clearwater, FL

Print_ISBN

978-1-4244-2382-8

Electronic_ISBN

978-1-4244-2382-8

Type

conf

DOI

10.1109/OMEMS.2009.5338602

Filename

5338602