Title :
Microscanner using self aligned vertical comb drives in a switched electrode configuration for large static rotation
Author :
Fritz, J. ; Pinter, S. ; Friese, C. ; Pirk, T. ; Seidel, H.
Author_Institution :
Robert Bosch GmbH, Stuttgart, Germany
Abstract :
We present a microscanner actuated by self-aligned vertical comb drives of high aspect ratio, designed for bidirectional static actuation. A stable rotational angle of plusmn8deg is demonstrated at 290VDC.
Keywords :
actuators; drives; micromechanical devices; bidirectional static actuation; large static rotation; microscanner; self-aligned vertical comb drives; switched electrode configuration; Electrodes;
Conference_Titel :
Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on
Conference_Location :
Clearwater, FL
Print_ISBN :
978-1-4244-2382-8
Electronic_ISBN :
978-1-4244-2382-8
DOI :
10.1109/OMEMS.2009.5338607
