• DocumentCode
    2476562
  • Title

    Microscanner using self aligned vertical comb drives in a switched electrode configuration for large static rotation

  • Author

    Fritz, J. ; Pinter, S. ; Friese, C. ; Pirk, T. ; Seidel, H.

  • Author_Institution
    Robert Bosch GmbH, Stuttgart, Germany
  • fYear
    2009
  • fDate
    17-20 Aug. 2009
  • Firstpage
    37
  • Lastpage
    38
  • Abstract
    We present a microscanner actuated by self-aligned vertical comb drives of high aspect ratio, designed for bidirectional static actuation. A stable rotational angle of plusmn8deg is demonstrated at 290VDC.
  • Keywords
    actuators; drives; micromechanical devices; bidirectional static actuation; large static rotation; microscanner; self-aligned vertical comb drives; switched electrode configuration; Electrodes;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on
  • Conference_Location
    Clearwater, FL
  • Print_ISBN
    978-1-4244-2382-8
  • Electronic_ISBN
    978-1-4244-2382-8
  • Type

    conf

  • DOI
    10.1109/OMEMS.2009.5338607
  • Filename
    5338607
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2476562