DocumentCode :
2476717
Title :
P1H-6 Picosecond Ultrasonics as a Helpful Technique for Introducing a New Electrode Material in BAW Technology: The Iridium Case
Author :
Devos, A. ; Olivares, J. ; Clement, M. ; Iborra, E. ; Gonzalez-Castilla, S. ; Rimmer, N. ; Rastogi, Ayush
Author_Institution :
UMR8520, Lille
fYear :
2007
fDate :
28-31 Oct. 2007
Firstpage :
1433
Lastpage :
1436
Abstract :
We present picosecond ultrasonic characterizations on e-beam evaporated Ir thin films and on AlN films deposited by pulsed DC reactive sputtering on Ir. Picosecond ultrasonics is an optical technique which uses ultrashort laser pulses to generate and detect very short acoustic pulses. We first investigate the properties of the Ir films by measuring samples of various thicknesses and deposition parameters. It permits to extract the longitudinal sound velocity, the acoustic impedance and the acoustic losses in the Ir electrode. Second, we focus on AlN on Ir films. We measure the thickness and the sound velocity of an AlN thin layer deposited on an Ir electrode. This work illustrates how useful the picosecond ultrasonic technique can be for introducing a new material in bulk acoustic wave technology.
Keywords :
acoustic impedance; aluminium compounds; bulk acoustic wave devices; high-speed optical techniques; iridium; laser beams; ultrasonic materials testing; AlN; BAW technology; Ir; acoustic impedance; acoustic losses; bulk acoustic wave technology; e-beam evaporated thin films; electrode material; iridium thin films; longitudinal sound velocity; optical technique; picosecond ultrasonics; pulsed DC reactive sputtering; ultrashort laser pulses; very short acoustic pulses; Acoustic measurements; Acoustic pulses; Electrodes; Optical films; Optical materials; Optical pulse generation; Pulsed laser deposition; Sputtering; Thickness measurement; Ultrasonic variables measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 2007. IEEE
Conference_Location :
New York, NY
ISSN :
1051-0117
Print_ISBN :
978-1-4244-1384-3
Electronic_ISBN :
1051-0117
Type :
conf
DOI :
10.1109/ULTSYM.2007.360
Filename :
4409933
Link To Document :
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