Title :
P1I-3 FBAR Multi-Layer Resonator for Remote Identification
Author :
Cherednick, V.I.
Author_Institution :
State Univ. Nizhny, Novgorod
Abstract :
Frequency spectra of multi-layer Al-AlN FBAR resonator are calculated. It is shown, that plurality of frequency spectra can be obtained by various combinations of quantities of layers and their thickness. Each spectrum is individual and can be used for remote identification similar to SAW tags.
Keywords :
acoustic resonators; bulk acoustic wave devices; identification; surface acoustic wave devices; FBAR multilayer resonator; bulk acoustic wave resonator; frequency spectra plurality; remote identification; Acoustic waves; Chemicals; Dielectric substrates; Film bulk acoustic resonators; Frequency; Partial differential equations; Piezoelectric devices; Radiofrequency identification; Surface acoustic wave devices; Surface acoustic waves;
Conference_Titel :
Ultrasonics Symposium, 2007. IEEE
Conference_Location :
New York, NY
Print_ISBN :
978-1-4244-1384-3
Electronic_ISBN :
1051-0117
DOI :
10.1109/ULTSYM.2007.362
