Title :
Large MEMS-based programmable slit mask for multi-object spectroscopy
Author :
Canonica, Michael ; Waldis, Severin ; Zamkotsian, Frederic ; Lanzoni, Patrick ; Noell, Wilfried ; De Rooij, Nico
Author_Institution :
Ecole Polytech. Fed. de Lausanne, Neuchatel, Switzerland
Abstract :
Next-generation infrared astronomical instrumentation for telescopes requires MOEMS-based programmable slit masks for multi-object spectroscopy. A large micromirror array of 20´000 micromirrors has been fabricated for cryogenic environment utilizing a dedicated assembly stage. Preliminary tests demonstrate the functionality of both the assembly system and the device.
Keywords :
astronomical telescopes; cryogenics; masks; micro-optomechanical devices; micromirrors; optical arrays; optical fabrication; cryogenic environment; dedicated assembly stage; large MEMS-based programmable slit mask; micromirror array; multiobject spectroscopy; next-generation infrared astronomical instrumentation; telescopes; Assembly; Bonding; Cryogenics; Electrodes; Infrared spectra; Micromechanical devices; Micromirrors; Mirrors; Spectroscopy; Telescopes; MEMS; MOEMS; cryogenic; large array; micromirror; mirror; multi-object spectrograph; programmable slit mask;
Conference_Titel :
Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on
Conference_Location :
Clearwater, FL
Print_ISBN :
978-1-4244-2382-8
Electronic_ISBN :
978-1-4244-2382-8
DOI :
10.1109/OMEMS.2009.5338621
