Title :
P1J-3 Evaluation of 2D Hydrophone Array System Using Epitaxial PZT Thin Film Grown on Epitaxial GAMMA-Al2O3/Si Substrate
Author :
Okada, Nagaya ; Higuchi, Kazuki ; Kobayashi, Kazuto ; Ito, Mikinori ; Takabe, Masashi ; Otonari, Mikito ; Akai, Daisuke ; Sawada, Kazuaki ; Ishida, Makoto
Author_Institution :
Honda Eletron. Co., Ltd., Toyohashi
Abstract :
A piezoelectric ultrasonic hydrophone array was fabricated using epitaxial lead zirconate titanate, Pb(Zx, Ti1-x)O3 (PZT) thin film grown on epitaxial SrRuO3/Pt/gamma-Al2O3/Si substrates. PZT film with 3 mum in thickness was prepared by sol- gel method. An experimental ultrasonic hydrophone array measurement system, a one dimensional (1-D) array of 10 elements and a two dimensional (2D) array of 4 times 4 elements have been developed to evaluate the hydrophone array system performance. In this paper, we describe the fabrication process of the hydrophone arrays and the data acquisition system. The beam direction was estimated and the B-mode image was reconstructed to evaluate the array sensitivity. The potential applications for this hydrophone array are discussed.
Keywords :
data acquisition; epitaxial growth; hydrophones; piezoelectric thin films; piezoelectric transducers; sol-gel processing; ultrasonic transducer arrays; 2D hydrophone array; B-mode image reconstruction; array sensitivity; beam direction; data acquisition system; epitaxial Gamma-Al2O3/Si substrate; epitaxial PZT thin film; epitaxial lead zirconate titanate; fabrication process; piezoelectric ultrasonic hydrophone array; sol-gel method; thin film growth; Data acquisition; Fabrication; Lead; Piezoelectric films; Semiconductor thin films; Sonar equipment; Substrates; System performance; Titanium compounds; Ultrasonic variables measurement;
Conference_Titel :
Ultrasonics Symposium, 2007. IEEE
Conference_Location :
New York, NY
Print_ISBN :
978-1-4244-1384-3
Electronic_ISBN :
1051-0117
DOI :
10.1109/ULTSYM.2007.366
