• DocumentCode
    2476895
  • Title

    Concentration measurement for sub-μliter solution using a cantilever sensor with an on-tip integrated micro spherical reflecting mirror

  • Author

    Liao, Chun-Da ; Chao, Keng-Hsing ; Tsai, Jui-che

  • Author_Institution
    Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei, Taiwan
  • fYear
    2009
  • fDate
    17-20 Aug. 2009
  • Firstpage
    25
  • Lastpage
    26
  • Abstract
    A cantilever sensor integrated with an on-tip micro spherical reflecting mirror (MSRM) exhibits a larger optical beam displacement than a conventional one, i.e. the system sensitivity/responsivity is enhanced. In this paper, it is employed as a concentration gauge that only requires 0.5 muL of solution. The MSRM-integrated cantilever is first set above a sodium chloride-water droplet carried by a glass substrate, and then the droplet is moved up gradually. Once the cantilever is touched by the droplet, it is pulled and bent down as the droplet is reshaped. The cantilever deformation amount is related to the surface tension of the solution, which increases with the mass percentage of sodium chloride. Therefore, by measuring the bending amount of the cantilever, the concentration of the NaCl-water solution can be determined. We also perform the experiments on the alcohol-water mixture, whose surface tension, conversely, reduces as the alcohol percentage increases.
  • Keywords
    bending; cantilevers; drops; micro-optomechanical devices; micromirrors; microsensors; optical sensors; sodium compounds; surface tension; water; NaCl-H2O; alcohol-water mixture; bending; cantilever sensor; concentration measurement; deformation; on-tip integrated microspherical reflecting mirror; optical beam displacement; sodium chloride-water droplet; sub-muliter solution; surface tension; Chemical and biological sensors; Force measurement; Glass; Mirrors; Optical beams; Optical sensors; Optoelectronic and photonic sensors; Pollution measurement; Sensor systems; Surface tension; Cantilever sensor; MEMS sensor; concentration meter; micro spherical reflecting mirror;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on
  • Conference_Location
    Clearwater, FL
  • Print_ISBN
    978-1-4244-2382-8
  • Electronic_ISBN
    978-1-4244-2382-8
  • Type

    conf

  • DOI
    10.1109/OMEMS.2009.5338624
  • Filename
    5338624