• DocumentCode
    2476995
  • Title

    Wireless driving of micromirror using electromagnetic induction

  • Author

    Sasaki, Minoru ; Ohnishi, Narimune ; Kumagai, Shinya ; Hane, Kazuhiro

  • Author_Institution
    Dept. of Adv. Sci. & Technol., Toyota Technol. Inst., Nagoya, Japan
  • fYear
    2009
  • fDate
    17-20 Aug. 2009
  • Firstpage
    11
  • Lastpage
    12
  • Abstract
    The wireless driving of the micromirror is investigated using the electromagnetic induction. Taking advantages of the low-voltage driving of the micromirror and the use of electrical and mechanical resonances, the mirror rotation angle of 0.6deg at the separation gap of 24 mm is obtained being excited by 1 mT field at the relatively low Q conditions.
  • Keywords
    electromagnetic actuators; electromagnetic induction; micromirrors; distance 24 mm; electrical resonance; electromagnetic induction; magnetic flux density 1 mT; mechanical resonance; micromirror; mirror rotation angle; wireless driving; Electromagnetic induction; Micromirrors; Electromagnetic Induction; Electrostatic driving; Micromirror; Wireless driving;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on
  • Conference_Location
    Clearwater, FL
  • Print_ISBN
    978-1-4244-2382-8
  • Electronic_ISBN
    978-1-4244-2382-8
  • Type

    conf

  • DOI
    10.1109/OMEMS.2009.5338629
  • Filename
    5338629
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2476995