DocumentCode
2477675
Title
Plasma bubbles on langmuir probe in inductively coupled plasma
Author
Ivanov, Stefan T. ; Nikolaev, N.I. ; Thomae, Rainer W. ; Klein, H. ; Hilschert, F.H.
Author_Institution
Sofia University
fYear
1996
fDate
1996
Keywords
Coils; Plasma applications; Plasma devices; Plasma immersion ion implantation; Plasma measurements; Plasma sources; Probes; Radio frequency; Space technology; Thermionic emission;
fLanguage
English
Publisher
ieee
Conference_Titel
Applied Electromagnetism, 1996. Trans Black Sea Region Symposium on
Conference_Location
Hellas, Greece
Print_ISBN
0-7803-3763-8
Type
conf
DOI
10.1109/AEM.1996.873109
Filename
873109
Link To Document