DocumentCode :
2477675
Title :
Plasma bubbles on langmuir probe in inductively coupled plasma
Author :
Ivanov, Stefan T. ; Nikolaev, N.I. ; Thomae, Rainer W. ; Klein, H. ; Hilschert, F.H.
Author_Institution :
Sofia University
fYear :
1996
fDate :
1996
Keywords :
Coils; Plasma applications; Plasma devices; Plasma immersion ion implantation; Plasma measurements; Plasma sources; Probes; Radio frequency; Space technology; Thermionic emission;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Applied Electromagnetism, 1996. Trans Black Sea Region Symposium on
Conference_Location :
Hellas, Greece
Print_ISBN :
0-7803-3763-8
Type :
conf
DOI :
10.1109/AEM.1996.873109
Filename :
873109
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2477675
