P2G-1 Effect of Nonuniform Loading Layer on Monolithic Thickness-Mode Piezoelectric Filters

Author

Pan, Wanling ; Abdolvand, Reza ; Ayazi, Farrokh

Author_Institution

Georgia Inst. of Technol., Atlanta

fYear

2007

fDate

28-31 Oct. 2007

Firstpage

1645

Lastpage

1648

Abstract

The effect of using a nonuniform loading layer on the frequency response of a thickness-mode piezoelectric filter is investigated. The goal is to create multiple peak frequency shifts by one extra loading layer on the filter structure. By varying the area of the loading layer, not only the peak frequency is shifted but also extra bandpass filters are created at an offset from the original filter. This may enable the fabrication of compact filter arrays for multi-channel systems. Preliminary measurement results show up to 300 MHz frequency shift for acoustically coupled piezoelectric-on-substrate filters operating at 1.2-1.5 GHz.

Keywords

acoustic resonator filters; band-pass filters; bulk acoustic wave devices; crystal filters; piezoelectric thin films; bandpass filters; compact filter arrays; frequency 1.2 GHz to 1.5 GHz; frequency response; monolithic thickness-mode piezoelectric filter; multichannel systems; multiple peak frequency shifts; nonuniform loading layer; piezoelectric-on-substrate filters; Band pass filters; Electrodes; Fabrication; Film bulk acoustic resonators; Frequency response; Piezoelectric films; Radio spectrum management; Resonance; Resonant frequency; Resonator filters;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2007. IEEE

Conference_Location

New York, NY

ISSN

1051-0117

Print_ISBN

978-1-4244-1384-3

Electronic_ISBN

1051-0117

Type

conf

DOI

10.1109/ULTSYM.2007.414

Filename

4409987