Title :
Nonlinear dynamic modeling of micromachined microwave switches
Author :
Chan, E.K. ; Kan, E.C. ; Dutton, R.W. ; Pinsky, P.M.
Author_Institution :
Center for Integrated Syst., Stanford Univ., CA, USA
Abstract :
Nonlinear dynamic lumped models of micromachined microwave switches have been formulated and successfully applied to analyses of transient characteristics and geometrical scaling. Parameter extraction through electrical measurements is summarized. The results are compared to transient quasi-2D simulations.
Keywords :
micromachining; microwave devices; nonlinear dynamical systems; switches; electrical measurement; geometrical scaling; micromachined microwave switch; nonlinear dynamic lumped model; parameter extraction; quasi-2D simulation; transient analysis; Damping; Deformable models; Electrostatics; Parameter extraction; Residual stresses; Solid modeling; Springs; Switches; Switching circuits; Transient analysis;
Conference_Titel :
Microwave Symposium Digest, 1997., IEEE MTT-S International
Conference_Location :
Denver, CO, USA
Print_ISBN :
0-7803-3814-6
DOI :
10.1109/MWSYM.1997.596617
