Title :
Design of an electronic oscillator for biosensing applications based on a MEMS resonator
Author :
Russino, Vincenzo ; Pieri, Francesco ; Bruschi, Paolo
Author_Institution :
Dipt. di Ing. dell´´Inf.: Elettron., Inf., Telecomun., Univ. di Pisa, Pisa, Italy
Abstract :
Resonant mass sensors (i.e. microbalances) are commonly used in chemical and biochemical sensing, and their MEMS counterparts, based on MEMS resonators, are actively investigated. In this work, we present the design of an integrated electronic oscillator, based on general purpose CMOS operational amplifiers (op-amps) and conceived to operate with a magnetically actuated MEMS resonator fabricated on the same chip as the op-amps. After a description of the resonator and op-amp structure and characteristics, a two-stage, positive feedback oscillator topology is presented. The simulated behavior of the oscillator is presented and discussed, and the temperature stability of the oscillator output frequency is analyzed.
Keywords :
CMOS analogue integrated circuits; biosensors; electromagnetic actuators; feedback oscillators; microactuators; microfabrication; micromechanical resonators; microsensors; operational amplifiers; CMOS operational amplifiers; biosensing applications; integrated electronic oscillator design; magnetically actuated MEMS resonator; op-amp structure; oscillator output frequency analysis; positive feedback oscillator topology; resonant mass sensors; temperature stability; CMOS integrated circuits; Integrated circuit modeling; Magnetic resonance; Micromechanical devices; Oscillators; Sensors;
Conference_Titel :
Ph.D. Research in Microelectronics and Electronics (PRIME), 2011 7th Conference on
Conference_Location :
Trento
Print_ISBN :
978-1-4244-9138-4
Electronic_ISBN :
978-1-4244-9136-0
DOI :
10.1109/PRIME.2011.5966215
