Title :
P4M-5 Accurate Assessment of CMUT Devices Through Precise Electrical Impedance Measurement in Air
Author :
Meynier, Cyril ; Certon, Dominique ; Teston, Franck ; Felix, Nicolas ; Ferin, Guillaume
Author_Institution :
Franc ois Rabelais Univ., Tours
Abstract :
This paper reports a technique to exploit results from electrical impedance measurement of cMUT devices in air. An analytical ID model has been used as a fitting function. The accuracy of this model has been theoretically analysed.
Keywords :
electric impedance measurement; piezoelectric transducers; ultrasonic transducers; analytical 1D model; cMUT devices; electrical impedance measurement; fitting function; Analytical models; Biomembranes; Capacitance; Electrodes; Electrostatics; Impedance measurement; Piezoelectric polarization; Piezoelectric transducers; Resonance; Voltage;
Conference_Titel :
Ultrasonics Symposium, 2007. IEEE
Conference_Location :
New York, NY
Print_ISBN :
978-1-4244-1384-3
Electronic_ISBN :
1051-0117
DOI :
10.1109/ULTSYM.2007.538
