Title :
P4M-8 Interaction Between a cMUT Cell and a Liquid Medium around the Parallel Resonance Frequency
Author :
Senlik, Muhammed N. ; Atalar, Abdullah ; Olcum, Selim
Author_Institution :
Bilkent Univ., Ankara
Abstract :
In this paper, we present how a capacitive micromachined ultrasonic transducer (cMUT) couples to the immersion medium, based on an accurate parametric model. We show that the velocity of cMUT membrane can be written as a sum of an average velocity term and a residual term. We demonstrate that this residual term carries non-zero energy at the parallel resonance frequency by investigating the interaction between the cMUT cell and a liquid medium. We develop a model that is also applicable around the parallel resonance frequency.
Keywords :
acoustic parametric devices; acoustic resonance; capacitive sensors; liquids; membranes; micromachining; ultrasonic transducers; cMUT membrane velocity; capacitive micromachined ultrasonic transducer; immersion medium interactions; liquid medium; parallel resonance frequency; parametric model; residual term; velocity term; Biomembranes; Capacitance; Coupling circuits; Equivalent circuits; Impedance; Parametric statistics; Resonance; Resonant frequency; Silicon; Ultrasonic transducers;
Conference_Titel :
Ultrasonics Symposium, 2007. IEEE
Conference_Location :
New York, NY
Print_ISBN :
978-1-4244-1384-3
Electronic_ISBN :
1051-0117
DOI :
10.1109/ULTSYM.2007.541
