Title :
Thermal and electrical properties of Si/Si0.8Ge0.2 and B4C/B9C films
Author :
Ghamaty, S. ; Elsner, N.
Author_Institution :
Hi-Z Technol., San Diego, CA, USA
Abstract :
Two-dimensional quantum wells have been synthesized by alternating layers of B4C and B9C in one system and alternating layers of Si and Si0.8Ge0.2 in another system. Such nanostructures are being investigated as candidate thermoelectric materials for high figures of merit (Z). The predicted enhancement is attributed to the confined motion of charge carriers and phonons in the two dimensions and separating them from the ion scattering centers. MBE and sputtering techniques have been used to prepare these multilayer films. Films have been deposited on single-crystal silicon substrates. The α and ρ properties of these films have been determined over a broad range of temperatures from 4.2 K to 1200 K and were previously reported. The α2/ρ values for these P type B-C and N type SiGe films were more than a factor of 10 to 30 times higher than bulk P type B-C and N type SiGe. Recently, thermal conductivities have also been measured with a modified 3-ω method. The room temperature thermal conductivity of Si and Si0.8Ge0.2 were also encouraging smaller, and about one third (1/3) of the bulk values and in line with theoretical predictions. The performance of the MBE films have been systematically compared with bulk materials. Preliminary thermoelectric measurements of the multilayer structures, lead us to believe that significant gains in the thermoelectric figure of merit (Z) may be possible with this approach. The first quantum well thermoelectric couple with N-type Si/Si0.8Ge0.2 and P-type B4C/B9C was fabricated from these films. The test results generated continue to indicate that much higher thermoelectric efficiencies can be achieved in the quantum wells compared to the bulk materials. Also, the potential cost of fabricating quantum well modules will be discussed and are expected to be much lower than present bulk thermoelectric module on a cost/watt basis
Keywords :
Ge-Si alloys; boron compounds; elemental semiconductors; semiconductor epitaxial layers; semiconductor materials; semiconductor quantum wells; silicon; sputtered coatings; thermal conductivity; thermoelectric conversion; thermoelectricity; 2D quantum wells; 4.2 to 1200 K; B4; B4C/B9C films; B9C; MBE; Si; Si/Si0.8Ge0.2 films; Si0.8Ge0.2; bulk materials; confined motion of charge carriers; electrical properties; high figures of merit; ion scattering centers; multilayer structures; nanostructures; phonons; potential cost; single-crystal silicon substrates; sputtering techniques; thermal conductivities; thermal properties; thermoelectric couple; thermoelectric efficiencies; thermoelectric materials; Costs; Germanium silicon alloys; Molecular beam epitaxial growth; Nanostructured materials; Nanostructures; Nonhomogeneous media; Semiconductor films; Silicon germanium; Thermal conductivity; Thermoelectricity;
Conference_Titel :
Thermoelectrics, 1998. Proceedings ICT 98. XVII International Conference on
Conference_Location :
Nagoya
Print_ISBN :
0-7803-4907-5
DOI :
10.1109/ICT.1998.740353