DocumentCode :
2481533
Title :
P5H-1 Hybrid Finite Element Analysis of Leakey Surface Acoustic Waves in Periodic Waveguides of Finite Thickness
Author :
Yu, Jiun-Der ; Yoon, Sangpil ; Kanna, Shigeo ; Oshio, Masahiro ; Tanaka, Masako
Author_Institution :
Epson R&D Inc., San Jose
fYear :
2007
fDate :
28-31 Oct. 2007
Firstpage :
2339
Lastpage :
2342
Abstract :
A numerical approach based on the hybrid finite element method is developed for the analysis of traveling SAW/LSAW in periodic waveguides of finite thickness. The method combines conventional finite elements for the inhomogeneous region including electrodes and modal expansions for the homogeneous substrate region. The wave reflection at the bottom surface of the substrate is taken care by enforcing the traction-free condition for each space harmonic in the modal expansion. Since some of the expansion components are exponentially increasing into the depth of the substrate, a very bad floating point overflow problem plagues the HFEM code. To avoid the floating point overflow problem when the traction-free condition is enforced, we propose an "adaptive wave amplitude allocation." The simulated dispersion curves and temperature characteristics of leaky SAWs on quartz substrates of finite thickness are presented.
Keywords :
acoustic wave reflection; finite element analysis; periodic structures; surface acoustic wave waveguides; SiO2; acoustic wave reflection; adaptive wave amplitude allocation; dispersion curves; finite-thickness periodic waveguides; homogeneous substrate region; hybrid finite element analysis; inhomogeneous region; leaky surface acoustic waves; modal expansion; quartz substrates; Acoustic waveguides; Acoustic waves; Electrodes; Equations; Finite element methods; Frequency; Reflection; Surface acoustic waves; Surface waves; Temperature;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 2007. IEEE
Conference_Location :
New York, NY
ISSN :
1051-0117
Print_ISBN :
978-1-4244-1384-3
Electronic_ISBN :
1051-0117
Type :
conf
DOI :
10.1109/ULTSYM.2007.588
Filename :
4410161
Link To Document :
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