Biocompatible nanolayered polymerization of MEMS devices

Author

Vidyala, Sri Divya ; Asghar, Waseem ; Iqbal, Samir M.

Author_Institution

Bioeng. Dept., Univ. of Texas at Arlington, Arlington, TX, USA

fYear

2011

fDate

Aug. 30 2011-Sept. 3 2011

Firstpage

2901

Lastpage

2904

Abstract

Deposition of polymeric and biocompatible nanolayers on the solid-state substrates is done using a simple vacuum chamber. The chemical characteristics of the deposited nanolayer are analyzed using Fourier transform infrared spectroscopy and X-ray photoelectron spectroscopy. The surface morphology of the nanolayers is analyzed using contact angle goniometer and scanning electron microscopy. The coated nanolayers show excellent stability in different chemical surroundings including the physiological pH therefore making it applicable in coating 3D MEMS devices and body implants which need medicated coating. A micropore is coated with this approach and results depict uniform coating of the structure.

Keywords

Fourier transform spectra; X-ray photoelectron spectra; coatings; contact angle; infrared spectra; micromechanical devices; nanostructured materials; polymerisation; polymers; scanning electron microscopy; surface morphology; 3D MEMS devices; Fourier transform infrared spectroscopy; X-ray photoelectron spectroscopy; biocompatible nanolayered polymerization; body implants; chemical properties; contact angle goniometer; nanolayered organic polymer coating; physiological pH; scanning electron microscopy; surface morphology; Chemicals; Coatings; Films; Nanobioscience; Surface impedance; Surface morphology; Surface treatment; Biocompatible Materials; Hydrogen-Ion Concentration; Micro-Electrical-Mechanical Systems; Microscopy, Electron, Scanning; Photoelectron Spectroscopy; Spectroscopy, Fourier Transform Infrared;

fLanguage

English

Publisher

ieee

Conference_Titel

Engineering in Medicine and Biology Society, EMBC, 2011 Annual International Conference of the IEEE

Conference_Location

Boston, MA

ISSN

1557-170X

Print_ISBN

978-1-4244-4121-1

Electronic_ISBN

1557-170X

Type

conf

DOI

10.1109/IEMBS.2011.6090799

Filename

6090799