DocumentCode
2482321
Title
Application of a 2-stage group-screening design to a whole-line semiconductor manufacturing simulation model
Author
Ivanova, Theodora ; Mollaghasemi, Mansooreh ; Malone, Linda
Author_Institution
Lucent Technologies
fYear
1996
fDate
1996
Firstpage
1039
Lastpage
1045
Keywords
Analytical models; Circuit simulation; Design engineering; Design for experiments; Manufacturing industries; Pulp manufacturing; Regression analysis; Semiconductor device manufacture; Technology management; Virtual manufacturing;
fLanguage
English
Publisher
ieee
Conference_Titel
Simulation Conference, 1996. Proceedings. Winter
Print_ISBN
0-7803-3383-7
Type
conf
DOI
10.1109/WSC.1996.873401
Filename
873401
Link To Document