Title :
P6E-3 Surface Acoustic Wave Linear Motor Using Segment-Structured Diamond-Like Carbon Films on Contact Surface
Author :
Fujii, Yosuke ; Kotani, Hiroyuki ; Masaya, T. ; Mizuno, Takeshi ; Aoki, Yuichi ; Adachi, Yusuke ; Ohtake, Naoto
Author_Institution :
Saitama Univ., Saitama
Abstract :
A surface acoustic wave (SAW) linear motor, which is a kind of ultrasonic motors, has many merits such as thin structure, large force, high speed, precise positioning and so on. On the other hand, wear is one of problems in the motor due to friction drive principle. Diamond-like carbon (DLC) films have been recognized as a wear resistant material. In this research, segment structured DLC films are focused to avoid the DLC property of easy damage. Installation of the films to friction surface of the motor is reported. Measurement result of its driving characteristics is also described.
Keywords :
diamond-like carbon; friction; linear motors; surface acoustic wave devices; ultrasonic motors; wear resistant coatings; C; SAW linear motor; contact surface; driving characteristics; friction drive principle; segment-structured diamond-like carbon films; surface acoustic wave linear motor; ultrasonic motor; wear resistant material; AC motors; Acoustic waves; Diamond-like carbon; Friction; Organic materials; Plasma sources; Silicon; Stators; Substrates; Surface acoustic waves;
Conference_Titel :
Ultrasonics Symposium, 2007. IEEE
Conference_Location :
New York, NY
Print_ISBN :
978-1-4244-1384-3
Electronic_ISBN :
1051-0117
DOI :
10.1109/ULTSYM.2007.640
