Title :
Integrated optical sensor for the detection of photoresist failures
Author :
Mirian, Farhad ; Diaz, Marcos Martinez ; Bitzer, Thomas
Author_Institution :
Metrol., Infineon Technol., Villach, Austria
Abstract :
In semiconductor manufacturing, the early detection of defects is one of the key factors to increase the yield. In this paper, we present an optical sensor for the detection of photo resist failures which has been integrated into the spin coating process equipment. The detection method is based on the measurement of light which is scattered at imperfections of the photo resist layer. In the case of the detection of a photoresist failure, the sensor sets an alarm which is sent to the advanced process control (APC) system.
Keywords :
flaw detection; optical sensors; photoresists; spin coating; advanced process control; defect detection; integrated optical sensor; photo resist failure; photo resist layer; photoresist failure detection; semiconductor manufacturing; spin coating process equipment; Coatings; Detectors; Laser beams; Optical sensors; Optical surface waves; Resists; Surface treatment; defect detection; integreted sensor; optical sensor; photoresist; spin coating;
Conference_Titel :
Instrumentation and Measurement Technology Conference (I2MTC), 2012 IEEE International
Conference_Location :
Graz
Print_ISBN :
978-1-4577-1773-4
DOI :
10.1109/I2MTC.2012.6229572
