Precise Fourier transform spectroscopy based measurement of dielectric properties of thin films at terahertz frequency range

Author

Chao, Liu ; Sharma, Anjali ; Afsar, Mohammed N.

Author_Institution

Dept. of Electr. & Comput. Eng., Tufts Univ., Medford, MA, USA

fYear

2012

fDate

13-16 May 2012

Firstpage

86

Lastpage

91

Abstract

Newly improved dispersive Fourier transform spectroscopy is applied to measure dielectric permittivity of the thin films at terahertz frequency range. Dielectric properties of thin film materials are hard to acquire as the thickness is too small to provide enough phase shift. The step size of the active mirror in the dispersive Fourier transform spectroscopy is enhanced to 500 nanometers which enable the spectroscopy to record the phase information accurately. By this improvement, broadband dielectric permittivity of thin film materials is determined from 300 GHz to 800 GHz.

Keywords

Fourier transform spectroscopy; dielectric thin films; millimetre wave measurement; mirrors; permittivity measurement; submillimetre wave measurement; active mirror step size; dielectric permittivity measurement; dielectric property measurement; frequency 300 GHz to 800 GHz; improved dispersive Fourier transform spectroscopy; phase information recording; phase shift; terahertz frequency range; thin film material; Dielectrics; Fourier transforms; Materials; Mirrors; Permittivity; Permittivity measurement; dispersive Fourier transform spectroscopy; permittivity; terahertz; thin film;

fLanguage

English

Publisher

ieee

Conference_Titel

Instrumentation and Measurement Technology Conference (I2MTC), 2012 IEEE International

Conference_Location

Graz

ISSN

1091-5281

Print_ISBN

978-1-4577-1773-4

Type

conf

DOI

10.1109/I2MTC.2012.6229584

Filename

6229584