Title :
Precise Fourier transform spectroscopy based measurement of dielectric properties of thin films at terahertz frequency range
Author :
Chao, Liu ; Sharma, Anjali ; Afsar, Mohammed N.
Author_Institution :
Dept. of Electr. & Comput. Eng., Tufts Univ., Medford, MA, USA
Abstract :
Newly improved dispersive Fourier transform spectroscopy is applied to measure dielectric permittivity of the thin films at terahertz frequency range. Dielectric properties of thin film materials are hard to acquire as the thickness is too small to provide enough phase shift. The step size of the active mirror in the dispersive Fourier transform spectroscopy is enhanced to 500 nanometers which enable the spectroscopy to record the phase information accurately. By this improvement, broadband dielectric permittivity of thin film materials is determined from 300 GHz to 800 GHz.
Keywords :
Fourier transform spectroscopy; dielectric thin films; millimetre wave measurement; mirrors; permittivity measurement; submillimetre wave measurement; active mirror step size; dielectric permittivity measurement; dielectric property measurement; frequency 300 GHz to 800 GHz; improved dispersive Fourier transform spectroscopy; phase information recording; phase shift; terahertz frequency range; thin film material; Dielectrics; Fourier transforms; Materials; Mirrors; Permittivity; Permittivity measurement; dispersive Fourier transform spectroscopy; permittivity; terahertz; thin film;
Conference_Titel :
Instrumentation and Measurement Technology Conference (I2MTC), 2012 IEEE International
Conference_Location :
Graz
Print_ISBN :
978-1-4577-1773-4
DOI :
10.1109/I2MTC.2012.6229584
