Title :
Time-resolved temperature measurements during pulsed laser irradiation
Author :
Kittl, J.A. ; Aziz, M.J. ; Brunco, D.P. ; Thompson, M.O.
Author_Institution :
Div. of Appl. Sci., Harvard Univ., Cambridge, MA, USA
Abstract :
Pulsed laser irradiation of absorbing materials leads to a rapid heating of the surface region and a negligible temperature rise in the bulk of the material. The large temperature gradient results in rapid cooling of the surface by thermal conduction, with cooling rates as large as 1010 K/s. There is great interest in determining temperatures during pulsed laser induced transformations such as crystallization of amorphous layers, melting and epitaxial regrowth of crystalline layers and ablation. We developed a technique that permits accurate measurement of temperatures with nanosecond resolution at a fixed depth in the sample. Heat-flow analysis is then used to obtain the temperature depth-profile through the layer of interest
Keywords :
crystallisation; laser ablation; laser materials processing; melting; surface treatment; temperature measurement; absorbing materials; accurate measurement; amorphous layers; crystallization; epitaxial regrowth; heat-flow analysis; large temperature gradient; melting; nanosecond resolution; negligible temperature rise; pulsed laser induced transformations; pulsed laser irradiation; rapid heating; surface region; temperature depth-profile; thermal conduction; time-resolved temperature measurements; Conducting materials; Cooling; Crystalline materials; Crystallization; Heating; Optical materials; Optical pulses; Pulse measurements; Surface emitting lasers; Temperature measurement;
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1993. LEOS '93 Conference Proceedings. IEEE
Conference_Location :
San Jose, CA
Print_ISBN :
0-7803-1263-5
DOI :
10.1109/LEOS.1993.379421