Title :
MEMS revolutionary impact on RF to millimeter-wave systems
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA
Abstract :
Summary form only given. MEMS (micro-electro-mechanical systems) technology has been applied to the RF/microwave/mm-wave frequency range, and a whole set of high performance, low cost components have been developed. This includes extremely low-loss and high isolation series and shunt switches from 1 GHz to 60 GHz, low-loss phase shifters from X-band to W-band frequencies, high-Q resonators and low-loss filters at 10-60 GHz, high-Q varactors and low-phase noise oscillators from 1 GHz to 30 GHz, high efficiency antennas from 30 GHz to 3 THz, and very low loss mm-wave transmission lines. The article summarizes the results and discusses MEMS revolutionary impact on RF to mm-wave systems.
Keywords :
micromechanical devices; microwave antennas; microwave filters; microwave switches; millimetre wave antennas; millimetre wave filters; oscillators; phase shifters; resonators; transmission lines; varactors; 1 to 30 GHz; 1 to 60 GHz; 10 to 60 GHz; 30 GHz to 3 THz; MEMS; MM-wave systems; RF systems; W-band; X-band; high efficiency antennas; high isolation series switches; high isolation shunt switches; high performance components; high-Q resonators; high-Q varactors; low cost components; low loss mm-wave transmission lines; low-loss filters; low-loss phase shifters; low-loss switches; low-phase noise oscillators; micro-electro-mechanical systems; microwave frequency range; millimeter-wave systems; mm-wave frequency range; Isolation technology; Microelectromechanical systems; Micromechanical devices; Microwave technology; Millimeter wave technology; Phase shifters; Radio frequency; Resonant frequency; Switches;
Conference_Titel :
Antennas and Propagation Society International Symposium, 2000. IEEE
Conference_Location :
Salt Lake City, UT, USA
Print_ISBN :
0-7803-6369-8
DOI :
10.1109/APS.2000.873710
