Title :
Thermal Mapping of Power Devices with a Completely Automated Thermoreflectance Measurement System
Author :
Rossi, L. ; Breglio, G. ; Irace, A. ; Spirito, P.
Author_Institution :
Dipt. di Ingegneria Elettronica e delle Telecomunicazioni, Univ. degli Studi Napoli "Federico II"
Abstract :
Aim of this paper is to present a system for a completely automated thermal mapping acquisition on the surface of power ICs and devices. This system is based on a single point sensor which measures the variation of the reflection coefficient due to a temperature change in metals and semiconductors. The main features of such sensor are the improved spatial resolution and bandwidth with respect to the classical infrared acquisition systems
Keywords :
power integrated circuits; power semiconductor devices; temperature measurement; thermoreflectance; infrared acquisition systems; power devices; power integrated circuit; reflection coefficient; single point sensor; thermal mapping acquisition; thermoreflectance measurement system; Bandwidth; Infrared sensors; Power integrated circuits; Power measurement; Reflection; Sensor phenomena and characterization; Sensor systems; Spatial resolution; Temperature sensors; Thermoreflectance;
Conference_Titel :
Research in Microelectronics and Electronics 2006, Ph. D.
Conference_Location :
Otranto
Print_ISBN :
1-4244-0157-7
DOI :
10.1109/RME.2006.1689891
