DocumentCode
2491938
Title
A Survey of Ion Beam Milling Techniques for Piezoelectric Device Fabrication
Author
Castellano, R.N. ; Hokanson, J.L.
fYear
1975
fDate
1975
Firstpage
128
Lastpage
134
Keywords
Chemicals; Etching; Fabrication; Frequency; Ion beams; Milling; Piezoelectric devices; Plasma applications; Plasma chemistry; Plasma materials processing;
fLanguage
English
Publisher
ieee
Conference_Titel
29th Annual Symposium on Frequency Control. 1975
Type
conf
DOI
10.1109/FREQ.1975.200073
Filename
1537013
Link To Document