Title :
Evaluation of Monolithically Integrated Antennas and RF Transmitters for Silicon Smart Micro Sensors with Wireless-Communication Ability
Author :
Kim, Jong-Wan ; Takao, Hidekuni ; Sawada, Kazuaki ; Ishida, Makoto
Author_Institution :
Toyohashi Univ. of Technol., Toyohashi
Abstract :
This paper presents the development of monolithically integrated RF transmitters and antennas for MEMS sensors such as accelerometers. Integrating wireless-communication ability on-chip microsensor, sensors can communicate the sensing data with information network by wireless. Integration technology of MEMS sensors, and RF-CMOS including RF passive components is requited to realize highly integrated smart micro sensors. CMOS oscillators with 315 MHz carrier frequency are designed and fabricated by our CMOS/MEMS integration technology. Spiral inductors for resonators and monolithic antennas have been realized with IC metallization process. Each essential component have been fabricated and evaluated.
Keywords :
CMOS integrated circuits; integrated circuit metallisation; intelligent sensors; microsensors; monolithic integrated circuits; radio transmitters; voltage-controlled oscillators; CMOS oscillators; MEMS sensors; RF passive components; RF transmitters; RF-CMOS integrated circuit; accelerometers; frequency 315 MHz; integrated circuit metallization; monolithically integrated antennas; resonators; silicon smart microsensors; spiral inductors; wireless communication; Accelerometers; CMOS technology; Intelligent sensors; Micromechanical devices; Network-on-a-chip; Radio frequency; Silicon; Transmitters; Transmitting antennas; Wireless sensor networks;
Conference_Titel :
Sensors, 2006. 5th IEEE Conference on
Conference_Location :
Daegu
Print_ISBN :
1-4244-0375-8
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2007.355711
