Title :
Preliminary investigations into SU-8 as a material for integrated all-optical microwave filters
Author :
Curtis, Philip D. ; Iezekiel, Stavros ; Miles, Robert E. ; Pescod, Christopher R.
Author_Institution :
Inst. of Microwaves & Photon., Leeds Univ., UK
Abstract :
The optical characteristics of the ultrathick negative photoresist SU-8 have been investigated for use in integrated all-optical microwave filters. SU-8 has excellent micromachining properties and optical waveguides can be produced using fast, low cost photolithographical techniques with processing temperatures of less than 100°C. This makes it a suitable material for rapid prototyping of integrated optical circuits. Multimode waveguides were fabricated and were found to have a loss of 6 dB/cm at 850 nm
Keywords :
integrated optics; micromachining; microwave filters; microwave photonics; optical fabrication; optical losses; optical materials; optical waveguide filters; photoresists; 100 C; 850 nm; SU-8 material; fabrication; integrated all-optical microwave filter; integrated optical circuit; loss; micromachining; multimode waveguide; optical characteristics; optical waveguide; photolithography; rapid prototyping; ultrathick negative photoresist; Costs; Integrated optics; Micromachining; Microwave filters; Optical filters; Optical materials; Optical waveguides; Prototypes; Resists; Temperature;
Conference_Titel :
High Frequency Postgraduate Student Colloquium, 2000
Conference_Location :
Dublin
Print_ISBN :
0-7803-6590-9
DOI :
10.1109/HFPSC.2000.874093
