Title :
Automated WLR testing of HBT´s
Author :
Sabin, Edwin ; Scarpulla, John ; Dacus, Steve
Author_Institution :
TRW Inc., Redondo Beach, CA, USA
Abstract :
This paper describes how a standard probing system was modified to allow automated wafer level reliability (WLR) testing of heterojunction bipolar transistors (HBT´s). It discusses how the thermally induced chuck movement was compensated for using a program written in LabView software. It also discusses how to set up gravity probes to allow wafer movement while keeping the needles on the pads. The paper then presents the emitter resistance result from Gummel plots obtained with the automated HBT tester
Keywords :
automatic testing; heterojunction bipolar transistors; semiconductor device reliability; semiconductor device testing; Gummel plot; LabView software; automated testing; emitter resistance; gravity probe; heterojunction bipolar transistor; wafer level reliability; Automatic testing; Cooling; Electrical resistance measurement; Gravity; Heating; Heterojunction bipolar transistors; Kelvin; Needles; Probes; Temperature;
Conference_Titel :
GaAs Reliability Workshop, 1999. Proceedings
Conference_Location :
Monterey, CA
Print_ISBN :
0-7908-0100-0
DOI :
10.1109/GAASRW.1999.874099
