DocumentCode
2492678
Title
Automated WLR testing of HBT´s
Author
Sabin, Edwin ; Scarpulla, John ; Dacus, Steve
Author_Institution
TRW Inc., Redondo Beach, CA, USA
fYear
1999
fDate
1999
Firstpage
21
Lastpage
57
Abstract
This paper describes how a standard probing system was modified to allow automated wafer level reliability (WLR) testing of heterojunction bipolar transistors (HBT´s). It discusses how the thermally induced chuck movement was compensated for using a program written in LabView software. It also discusses how to set up gravity probes to allow wafer movement while keeping the needles on the pads. The paper then presents the emitter resistance result from Gummel plots obtained with the automated HBT tester
Keywords
automatic testing; heterojunction bipolar transistors; semiconductor device reliability; semiconductor device testing; Gummel plot; LabView software; automated testing; emitter resistance; gravity probe; heterojunction bipolar transistor; wafer level reliability; Automatic testing; Cooling; Electrical resistance measurement; Gravity; Heating; Heterojunction bipolar transistors; Kelvin; Needles; Probes; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
GaAs Reliability Workshop, 1999. Proceedings
Conference_Location
Monterey, CA
Print_ISBN
0-7908-0100-0
Type
conf
DOI
10.1109/GAASRW.1999.874099
Filename
874099
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